1.Product summary
AS200 series controllers are suitable for a wide range of conventional gases with a repeatability of up to ±0.2%F.S. Low leakage rate, good air tightness; Can support a variety of signal output, including digital, 1 ~ 5V and 4 ~ 20mA analog signal, can use a single power supply (+15 ~ +24 VDC), suitable for different working scenarios; The standard open communication protocol provides convenience for customers to develop their own control and acquisition software; At the same time, the product also provides powerful free upper computer software, convenient for users to debug operation.
2.Application
AS200 series Flow controller (MFC) is mainly used for precision control and measurement of gas mass flow. They have important applications in the scientific research and production of semiconductor integrated circuit technology, special materials, chemical industry, petroleum industry, medicine, environmental protection and vacuum and other fields. Typical applications include: integrated circuit process equipment, such as epitaxy, diffusion, plasma etching, sputtering, ion implantation and various CVD equipment; Other industry equipment, such as optical fiber melting, micro-reaction devices, mixed gas distribution systems, gas sampling devices, capillary meters, gas chromatographs and other analytical instruments.
